Shutdown svgcoat2 SNF 2007-04-14 10:06:43: Wafer stuck on prime oven and hot plate

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Apr 16 07:00:28 PDT 2007

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User ran wafer upside down ,. removed wafer, cleaned resist 
residues from hotplate , cycled wafers , ready to use.

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Next message: Problem svgcoat2 SNF 2007-04-24 07:35:08: working on defective EBR dispense
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