Problem svgcoat2 SNF 2007-04-25 20:04:46: Disconnected EBR- bad smell in litho

ericp at snf.stanford.edu ericp at snf.stanford.edu
Wed Apr 25 20:04:46 PDT 2007


Mohammed alerted me to a bad smell near the 
coater (and most of litho).  I think I've traced this to 
track 2 EBR.  I've disconnected track 2 EBR at the 
canister outlet.  I'm waiting for the air to clear to see if that's
indeed the source.  




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