Problem svgcoat2 SNF 2007-04-24 07:35:08: working on defective EBR dispense

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Apr 26 08:30:55 PDT 2007


replaced broken EBR Valve , checked for Leaks , NO leaks 
found after cycling 7 wafers , System Ok to use. 




More information about the svgcoat2-pcs mailing list