From vilanova at snf.stanford.edu Wed Aug 1 07:28:01 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 1 Aug 2007 07:28:01 -0700 Subject: Problem svgcoat2 SNF 2007-07-31 23:16:43: resist on hotplate Message-ID: removed resist residues from hotplate, Please make sure the bottom side of the wafer ( Usually these are the Dummy wafers) is clean before you use them , ok to use. From king at snf.stanford.edu Wed Aug 1 15:26:38 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 1 Aug 2007 15:26:38 -0700 Subject: Problem svgcoat2 SNF 2007-08-01 15:26:38: resist bottle looks low Message-ID: From vilanova at snf.stanford.edu Thu Aug 2 08:15:16 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 2 Aug 2007 08:15:16 -0700 Subject: Problem svgcoat2 SNF 2007-08-01 15:26:38: resist bottle looks low Message-ID: replaced empty bottle purged line , ok to use. From apettes at snf.stanford.edu Sun Aug 5 22:00:11 2007 From: apettes at snf.stanford.edu (apettes at snf.stanford.edu) Date: Sun, 5 Aug 2007 22:00:11 -0700 Subject: Problem svgcoat2 SNF 2007-08-05 22:00:10: Send indexer is not functioning Message-ID: From vilanova at snf.stanford.edu Mon Aug 6 07:20:44 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Aug 2007 07:20:44 -0700 Subject: Problem svgcoat2 SNF 2007-08-05 22:00:10: Send indexer is not functioning Message-ID: the bottom carboy was full, Emptied carboy, cycled wafers , ok to use. From mahnaz at snf.stanford.edu Wed Aug 8 10:40:32 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 8 Aug 2007 10:40:32 -0700 Subject: Problem svgcoat2 SNF 2007-08-08 10:40:31: mario show khan Message-ID: how to clean the nozzel and purge the line. From vilanova at snf.stanford.edu Wed Aug 8 10:45:36 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 8 Aug 2007 10:45:36 -0700 Subject: Problem svgcoat2 SNF 2007-08-08 10:40:31: mario show khan Message-ID: Completed cleaning and purging process. From jparker at snf.stanford.edu Wed Aug 8 12:06:49 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 8 Aug 2007 12:06:49 -0700 Subject: Shutdown svgcoat2 SNF 2007-08-08 12:06:48: Wafer can get stuck at coat step Message-ID: Wafer arrives at middle stage for coating, vacuum is pulled on wafer, but wafer is not pulled down for coating for a delay of 5-120 seconds. Problem not always repeatable, but shorter delays before first wafer is pulled down (5-10 sec. delay) happens more often. Long delay (60 sec+) case repeated 3x in the course of the morning (over 5.5 hour period). 2nd wafer in a series doesn't seem to have this problem, and only dummy wafers had the longer delay problem. From vilanova at snf.stanford.edu Wed Aug 8 14:50:35 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 8 Aug 2007 14:50:35 -0700 Subject: Shutdown svgcoat2 SNF 2007-08-08 12:06:48: Wafer can get stuck at coat step Message-ID: adjusted air pressure to the wafer sensors, adjusted rail position cycled many wafers, ready to use. From ecocker at snf.stanford.edu Fri Aug 10 10:09:06 2007 From: ecocker at snf.stanford.edu (ecocker at snf.stanford.edu) Date: Fri, 10 Aug 2007 10:09:06 -0700 Subject: Comment svgcoat2 SNF 2007-08-10 10:09:05: rail on resist spinner getting stuck Message-ID: The rails for moving the wafer on/off of the resist spinner seem to stick in place occasionally (they won't separate to let the wafer be pulled down). From vipin at snf.stanford.edu Fri Aug 10 10:24:34 2007 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Fri, 10 Aug 2007 10:24:34 -0700 Subject: Problem svgcoat2 SNF 2007-08-10 10:24:33: wafer chuck Message-ID: The wafer chuck does not go down automatically at the coating station. The two rails at the side have to be manually pushed towards the centre for the chuck to go down and coat. From huangzb at snf.stanford.edu Tue Aug 14 03:14:10 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Tue, 14 Aug 2007 03:14:10 -0700 Subject: Problem svgcoat2 SNF 2007-08-14 03:14:09: transfer stop Message-ID: The wafer is not transfering either in Auto or manual mode. The rail cassette will not lower down. From vilanova at snf.stanford.edu Wed Aug 15 07:42:55 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 15 Aug 2007 07:42:55 -0700 Subject: Problem svgcoat2 SNF 2007-08-14 03:14:09: transfer stop Message-ID: Cycled wafers , indexer sned and receive are working fine , I cycled a few wafers and the transfers belts are working fine ( manual and auto mode) From vilanova at snf.stanford.edu Thu Aug 16 09:55:43 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 16 Aug 2007 09:55:43 -0700 Subject: Comment svgcoat2 SNF 2007-08-16 09:55:42: Tool Down for tomorrow's maintenance.... Message-ID: We are going to shutdown the tool for a couple of hours tomorrow 8/17/07 to replaced an intermitent problem with the wafers transfer and chuck. From vilanova at snf.stanford.edu Fri Aug 17 11:30:13 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 17 Aug 2007 11:30:13 -0700 Subject: Comment svgcoat2 SNF 2007-07-02 07:50:16: Resist On HMDS Hotplate Message-ID: comment cleared. From vilanova at snf.stanford.edu Fri Aug 17 11:30:24 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 17 Aug 2007 11:30:24 -0700 Subject: Comment svgcoat2 SNF 2007-07-12 10:23:41: i am done and track is clean Message-ID: cleared. From vilanova at snf.stanford.edu Fri Aug 17 11:31:07 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 17 Aug 2007 11:31:07 -0700 Subject: Comment svgcoat2 SNF 2007-08-10 10:09:05: rail on resist spinner getting stuck Message-ID: replaced air cylinder rail cycled wafers , ready to use From vilanova at snf.stanford.edu Fri Aug 17 11:32:07 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 17 Aug 2007 11:32:07 -0700 Subject: Problem svgcoat2 SNF 2007-08-10 10:24:33: wafer chuck Message-ID: replaced air cylinder, adjusted airflow , cycled wafers, ready to use. From vilanova at snf.stanford.edu Fri Aug 17 11:32:22 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 17 Aug 2007 11:32:22 -0700 Subject: Comment svgcoat2 SNF 2007-08-16 09:55:42: Tool Down for tomorrow's maintenance.... Message-ID: Maintenance completed,. From mahnaz at snf.stanford.edu Fri Aug 17 14:01:03 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 17 Aug 2007 14:01:03 -0700 Subject: Problem svgcoat2 SNF 2007-08-17 14:01:02: intermittenly back EBR splash Message-ID: From vilanova at snf.stanford.edu Mon Aug 20 08:06:30 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Aug 2007 08:06:30 -0700 Subject: Problem svgcoat2 SNF 2007-08-17 14:01:02: intermittenly back EBR splash Message-ID: Cleaned catch cup, purged line, cycled wafers, no more EBR splash, Ok to use. From jparker at snf.stanford.edu Mon Aug 20 09:52:48 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Mon, 20 Aug 2007 09:52:48 -0700 Subject: Shutdown svgcoat2 SNF 2007-08-20 09:52:47: Receiving indexer not working Message-ID: Receiving indexer not dropping down. From vilanova at snf.stanford.edu Mon Aug 20 10:34:19 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Aug 2007 10:34:19 -0700 Subject: Shutdown svgcoat2 SNF 2007-08-20 09:52:47: Receiving indexer not working Message-ID: Adjusted receiving Indexer sensor , cycled wafers, ok to use. From mahnaz at snf.stanford.edu Tue Aug 21 14:43:27 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 21 Aug 2007 14:43:27 -0700 Subject: Problem svgcoat2 SNF 2007-08-21 14:43:27: reciever is not going down Message-ID: From vilanova at snf.stanford.edu Tue Aug 21 15:10:11 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Aug 2007 15:10:11 -0700 Subject: Problem svgcoat2 SNF 2007-08-21 14:43:27: reciever is not going down Message-ID: adjusted receiving Indexer, ok to use. From gsosa at snf.stanford.edu Fri Aug 24 09:09:38 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 24 Aug 2007 09:09:38 -0700 Subject: Shutdown svgcoat2 SNF 2007-08-24 09:09:37: receive indexer problem Message-ID: receive indexer problem. From gsosa at snf.stanford.edu Fri Aug 24 09:39:25 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 24 Aug 2007 09:39:25 -0700 Subject: Shutdown svgcoat2 SNF 2007-08-24 09:09:37: receive indexer problem Message-ID: cleaned the indexer slot sensors and comb. Tested operation. All OK. GS From jrjain at snf.stanford.edu Fri Aug 24 17:54:47 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Fri, 24 Aug 2007 17:54:47 -0700 Subject: Problem svgcoat2 SNF 2007-08-24 17:54:46: Receive cassette problem Message-ID: Receiver cassette won't go down to receive wafers. Tried resetting casette and power cycling. Nothing works. From jrjain at snf.stanford.edu Fri Aug 24 19:02:19 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Fri, 24 Aug 2007 19:02:19 -0700 Subject: Problem svgcoat2 SNF 2007-08-24 19:02:14: Spin problem Message-ID: During resist dispense for some wafers, chuck stopped spinning. Resist kept dispensing, but did not distribute evenly over wafer (obvious under green light). From khanh at snf.stanford.edu Sat Aug 25 16:08:40 2007 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Sat, 25 Aug 2007 16:08:40 -0700 Subject: Problem svgcoat2 SNF 2007-08-25 16:08:37: Chuck stop spinning while dispening over the wafers Message-ID: From khanh at snf.stanford.edu Sat Aug 25 16:09:51 2007 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Sat, 25 Aug 2007 16:09:51 -0700 Subject: Problem svgcoat2 SNF 2007-08-25 16:09:50: Chuck stop spinning while dispensing resist over the wafers Message-ID: From mtang at snf.stanford.edu Mon Aug 27 09:24:49 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 27 Aug 2007 09:24:49 -0700 Subject: Problem svgcoat2 SNF 2007-08-27 09:24:48: Manual coat only Message-ID: Receiver indexer problem leads to spindle stopping. Use only in manual mode one wafer at a time. Rebuild indexer expected later in the week. From mtang at snf.stanford.edu Mon Aug 27 09:25:36 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 27 Aug 2007 09:25:36 -0700 Subject: Problem svgcoat2 SNF 2007-08-24 17:54:46: Receive cassette problem Message-ID: See problem note 8/27. From mtang at snf.stanford.edu Mon Aug 27 09:25:46 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 27 Aug 2007 09:25:46 -0700 Subject: Problem svgcoat2 SNF 2007-08-24 19:02:14: Spin problem Message-ID: See problem note 8/27. From mtang at snf.stanford.edu Mon Aug 27 09:25:54 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 27 Aug 2007 09:25:54 -0700 Subject: Problem svgcoat2 SNF 2007-08-25 16:08:37: Chuck stop spinning while dispening over the wafers Message-ID: See problem note 8/27. From mtang at snf.stanford.edu Mon Aug 27 09:26:00 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 27 Aug 2007 09:26:00 -0700 Subject: Problem svgcoat2 SNF 2007-08-25 16:09:50: Chuck stop spinning while dispensing resist over the wafers Message-ID: See problem note 8/27. From gsosa at snf.stanford.edu Mon Aug 27 14:05:36 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 27 Aug 2007 14:05:36 -0700 Subject: Shutdown svgcoat2 SNF 2007-08-27 14:05:36: Spindle Problem Message-ID: Spindle deviation error. Unable to calibrate spindle. Need to replace spindle motor. GS From gsosa at snf.stanford.edu Mon Aug 27 16:56:01 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 27 Aug 2007 16:56:01 -0700 Subject: Shutdown svgcoat2 SNF 2007-08-27 14:05:36: Spindle Problem Message-ID: Replaced the spindle motor. Performed spindle calibration. Checked program 7 resist thickness. OK at 1.0 micron. Renata will check 1.6 micron thicknesss and advise. GS From gsosa at snf.stanford.edu Thu Aug 30 18:21:38 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 30 Aug 2007 18:21:38 -0700 Subject: Problem svgcoat2 SNF 2007-08-27 09:24:48: Manual coat only Message-ID: Vendor from PicoTrack came in and installed the receive indexer.He also replaced the Keyboard assembly. Somehow process programs got wiped out during these change outs. Had to re-install the coat/bake and arm programs. Had to test and fine tune arm programs. Checked program #8 thickness looks uniform at 1.72 microns. Compared to the historical data it falls right in. Calibrated the spindle. Fine tune spindle delay time. Full system operation OK. GS From vilanova at snf.stanford.edu Fri Aug 31 07:04:16 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 31 Aug 2007 07:04:16 -0700 Subject: Problem svgcoat2 SNF 2007-06-14 09:05:18: key pad need to be replaced Message-ID: the key pad has been replaced.