Shutdown svgcoat2 SNF 2007-08-08 12:06:48: Wafer can get stuck at coat step

jparker at snf.stanford.edu jparker at snf.stanford.edu
Wed Aug 8 12:06:49 PDT 2007


Wafer arrives at middle stage for coating, vacuum is pulled on wafer, but wafer is not pulled down for coating for a delay of 5-120 seconds.
Problem not always repeatable, but shorter delays before first wafer is pulled down (5-10 sec. delay) happens more often. Long delay (60 sec+) case repeated 3x in the course of the morning (over 5.5 hour period).
2nd wafer in a series doesn't seem to have this problem, and only dummy wafers had the longer delay problem.




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