Comment svgcoat2 SNF 2007-08-10 10:09:05: rail on resist spinner getting stuck

ecocker at snf.stanford.edu ecocker at snf.stanford.edu
Fri Aug 10 10:09:06 PDT 2007


The rails for moving the wafer on/off of the resist spinner seem to stick in place occasionally (they won't separate to let the wafer be pulled down).




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