Problem svgcoat2 SNF 2007-08-10 10:24:33: wafer chuck
vipin at snf.stanford.edu
vipin at snf.stanford.edu
Fri Aug 10 10:24:34 PDT 2007
The wafer chuck does not go down automatically at the coating station. The two rails at the side have to be manually pushed towards the centre for the chuck to go down and coat.
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