Problem svgcoat2 SNF 2007-08-10 10:24:33: wafer chuck

vipin at snf.stanford.edu vipin at snf.stanford.edu
Fri Aug 10 10:24:34 PDT 2007


The wafer chuck does not go down automatically at the coating station. The two rails at the side have to be manually pushed towards the centre for the chuck to go down and coat.




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