Comment svgcoat2 SNF 2007-08-16 09:55:42: Tool Down for tomorrow's maintenance....

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Aug 16 09:55:43 PDT 2007


We are going to  shutdown the tool for a couple of hours
tomorrow 8/17/07 to replaced an intermitent problem with
the  wafers transfer and chuck. 




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