Problem svgcoat2 SNF 2007-08-24 19:02:14: Spin problem

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Fri Aug 24 19:02:19 PDT 2007


During resist dispense for some wafers, chuck stopped spinning.  Resist kept dispensing, but did not distribute evenly over wafer (obvious under green light).




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