Problem svgcoat2 SNF 2007-08-27 09:24:48: Manual coat only

mtang at snf.stanford.edu mtang at snf.stanford.edu
Mon Aug 27 09:24:49 PDT 2007


Receiver indexer problem leads to spindle stopping.  Use only in manual mode one wafer at a time.  Rebuild indexer expected later in the week.




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