Shutdown svgcoat2 SNF 2007-08-27 14:05:36: Spindle Problem

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Aug 27 16:56:01 PDT 2007

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Replaced the spindle motor. Performed spindle calibration. Checked program 7 resist thickness. OK at 1.0 micron.  Renata will check 1.6 micron thicknesss and advise.   GS

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