Problem svgcoat2 SNF 2007-08-27 09:24:48: Manual coat only

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Aug 30 18:21:38 PDT 2007


Vendor from PicoTrack came in and installed the receive indexer.He also replaced the Keyboard assembly. Somehow process programs got wiped out during these change outs. Had to re-install the coat/bake and arm programs. Had to test and fine tune arm programs. Checked program #8 thickness looks uniform at 1.72 microns. Compared to the historical data it falls right in. Calibrated the spindle. Fine tune spindle delay time. Full system operation OK.  GS 




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