From linyoucao at snf.stanford.edu  Thu Dec  6 03:25:03 2007
From: linyoucao at snf.stanford.edu (linyoucao at snf.stanford.edu)
Date: Thu, 6 Dec 2007 03:25:03 -0800
Subject: Problem svgcoat2 SNF 2007-12-06 03:25:02: Prime part not work
Message-ID: <mailman.254.1356283431.4703.svgcoat2-pcs@snf.stanford.edu>

Prime part not work.



From gsosa at snf.stanford.edu  Thu Dec  6 07:52:23 2007
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 6 Dec 2007 07:52:23 -0800
Subject: Problem svgcoat2 SNF 2007-12-06 03:25:02: Prime part not work
Message-ID: <mailman.255.1356283431.4703.svgcoat2-pcs@snf.stanford.edu>

Cycled system power. Tested track operation. All OK



From jrjain at snf.stanford.edu  Fri Dec  7 17:30:32 2007
From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu)
Date: Fri, 7 Dec 2007 17:30:32 -0800
Subject: Problem svgcoat2 SNF 2007-12-07 17:30:31: 1um 3612 nonuniform
Message-ID: <mailman.256.1356283431.4703.svgcoat2-pcs@snf.stanford.edu>

Even after cleaning nozzle with acetone twice, purging thrice, and running 7 dummies, resist still comes out very nonuniformly.  Can see large streak patterns even without green light. 



From vilanova at snf.stanford.edu  Tue Dec 11 07:41:54 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 11 Dec 2007 07:41:54 -0800
Subject: Problem svgcoat2 SNF 2007-12-07 17:30:31: 1um 3612 nonuniform
Message-ID: <mailman.257.1356283431.4703.svgcoat2-pcs@snf.stanford.edu>

Adjusted suck back, cycled wafers , uniformity looks Good.