From riteshj at snf.stanford.edu Thu Feb 1 15:00:44 2007 From: riteshj at snf.stanford.edu (riteshj at snf.stanford.edu) Date: Thu, 1 Feb 2007 15:00:44 -0800 Subject: Problem svgcoat2 SNF 2007-02-01 15:00:43: sequencing error Message-ID: there was some sequencing error and the wafer is stuck and does not proceed down the track ... anybody know how to reset the track ? From uyoon at snf.stanford.edu Thu Feb 1 15:16:01 2007 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Thu, 1 Feb 2007 15:16:01 -0800 Subject: Problem svgcoat2 SNF 2007-02-01 15:00:43: sequencing error Message-ID: power down and restarted. working fine. From huangzb at snf.stanford.edu Sat Feb 3 14:23:16 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sat, 3 Feb 2007 14:23:16 -0800 Subject: Problem svgcoat2 SNF 2007-02-03 14:23:16: bad coating 1.6um 3612 Message-ID: See strange spikes on the wafer with big drips on the end of spikes From vilanova at snf.stanford.edu Mon Feb 5 07:24:12 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Feb 2007 07:24:12 -0800 Subject: Problem svgcoat2 SNF 2007-02-03 14:23:16: bad coating 1.6um 3612 Message-ID: Purged Line , cleaned dispense hose , cycled wafers Using programs 2 , 7, and 8 , All my wafers are nice and clear. ok to use. From hyunjoo at snf.stanford.edu Wed Feb 14 15:43:36 2007 From: hyunjoo at snf.stanford.edu (hyunjoo at snf.stanford.edu) Date: Wed, 14 Feb 2007 15:43:36 -0800 Subject: Problem svgcoat2 SNF 2007-02-14 15:43:36: index reset doesn't work Message-ID: the end cassettes doesn't come up From tzangle at snf.stanford.edu Wed Feb 14 17:07:10 2007 From: tzangle at snf.stanford.edu (tzangle at snf.stanford.edu) Date: Wed, 14 Feb 2007 17:07:10 -0800 Subject: Problem svgcoat2 SNF 2007-02-14 17:07:10: Resist 3 out of stock Message-ID: Track 2 Resist bottle 3 (3617m) is empty and there is no more available in the flammable storage cabinet. From vilanova at snf.stanford.edu Thu Feb 15 10:11:50 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 15 Feb 2007 10:11:50 -0800 Subject: Problem svgcoat2 SNF 2007-02-14 15:43:36: index reset doesn't work Message-ID: the indexer wasnt working because the resist bottle was empty i changed the resist bottle (3617M) purged line, indexer working fine , ok to use. From vilanova at snf.stanford.edu Thu Feb 15 10:12:06 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 15 Feb 2007 10:12:06 -0800 Subject: Problem svgcoat2 SNF 2007-02-14 17:07:10: Resist 3 out of stock Message-ID: read previous message. From ee410d at snf.stanford.edu Thu Feb 15 22:11:43 2007 From: ee410d at snf.stanford.edu (ee410d at snf.stanford.edu) Date: Thu, 15 Feb 2007 22:11:43 -0800 Subject: Problem svgcoat2 SNF 2007-02-15 22:11:42: ebr alarm Message-ID: From vilanova at snf.stanford.edu Fri Feb 16 08:18:08 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 16 Feb 2007 08:18:08 -0800 Subject: Problem svgcoat2 SNF 2007-02-15 22:11:42: ebr alarm Message-ID: ebr canister refilled, ok to use. From khanh at snf.stanford.edu Sat Feb 17 11:19:01 2007 From: khanh at snf.stanford.edu (khanh at snf.stanford.edu) Date: Sat, 17 Feb 2007 11:19:01 -0800 Subject: Problem svgcoat2 SNF 2007-02-17 11:19:01: Alarming on track 2 drain Message-ID: From aecohen at snf.stanford.edu Sat Feb 17 21:31:05 2007 From: aecohen at snf.stanford.edu (aecohen at snf.stanford.edu) Date: Sat, 17 Feb 2007 21:31:05 -0800 Subject: Comment svgcoat2 SNF 2007-02-17 21:31:05: alarm turned off Message-ID: I pressed the button to drain the resist waste from track 2 and the alarm went off. From emyers at snf.stanford.edu Mon Feb 19 08:40:40 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 19 Feb 2007 08:40:40 -0800 Subject: Problem svgcoat2 SNF 2007-02-17 11:19:01: Alarming on track 2 drain Message-ID: Jim checked recovery system. Looks like someone pumped out drain. From emyers at snf.stanford.edu Mon Feb 19 08:41:06 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 19 Feb 2007 08:41:06 -0800 Subject: Comment svgcoat2 SNF 2007-02-17 21:31:05: alarm turned off Message-ID: Everything looks good