Problem svgcoat2 SNF 2007-02-03 14:23:16: bad coating 1.6um 3612

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Feb 5 07:24:12 PST 2007


Purged Line , cleaned dispense hose , cycled wafers 
Using programs 2 , 7, and 8 , All my wafers are nice and clear.
ok to use. 




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