From vilanova at snf.stanford.edu Tue Jan 2 14:04:54 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 2 Jan 2007 14:04:54 -0800 Subject: Shutdown svgcoat2 SNF 2007-01-02 14:04:54: board Problem. Message-ID: From mahnaz at snf.stanford.edu Tue Jan 2 16:01:12 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 2 Jan 2007 16:01:12 -0800 Subject: Comment svgcoat2 SNF 2007-01-02 16:01:12: not working at all Message-ID: checked a;`ll the arm programs, all ok. vender will be in tomorrow morning. From vilanova at snf.stanford.edu Thu Jan 4 16:03:40 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Jan 2007 16:03:40 -0800 Subject: Shutdown svgcoat2 SNF 2007-01-02 14:04:54: board Problem. Message-ID: Replaced broken Arm Stepper Motor, also replaced Burned receiving Indexer Motor , Adjusted centering FLags , Adjusted and calibrated HPO ( post bake ) calibrated spindle, cycled wafers , ready to use. From vilanova at snf.stanford.edu Thu Jan 4 16:03:57 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Jan 2007 16:03:57 -0800 Subject: Comment svgcoat2 SNF 2007-01-02 16:01:12: not working at all Message-ID: Please read previous Message. From mahnaz at snf.stanford.edu Thu Jan 4 16:49:49 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 4 Jan 2007 16:49:49 -0800 Subject: Comment svgcoat2 SNF 2007-01-04 16:49:48: tested Message-ID: 3612 1um ( 10236, 10202, 10211, 10198,10224) 3612 1.6 um ( 16920, 16950, 16930, 16948, 16927) 220-3 ( 30563, 30711, 30353, 30335, 30402) I will test the 3617m tomorrow. From jimkruger at snf.stanford.edu Thu Jan 4 17:48:51 2007 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Thu, 4 Jan 2007 17:48:51 -0800 Subject: Problem svgcoat2 SNF 2007-01-04 17:48:51: 2 problems Message-ID: less serious, the receiver cassette mis-sensed on 2 out of about 10 wafers. More serious: the spinner showed a 2% low speed on dispense and would not continue. I turned off power to recover my dripping wafer. On restart, I could not get the track to spin another wafer. Wafer starts but is not loaded on spinner. From fatihs at snf.stanford.edu Thu Jan 4 22:44:59 2007 From: fatihs at snf.stanford.edu (fatihs at snf.stanford.edu) Date: Thu, 4 Jan 2007 22:44:59 -0800 Subject: Problem svgcoat2 SNF 2007-01-04 22:44:59: Coater doesn't work Message-ID: The spinner doesn't accept the wafer after HMDS step. From fatihs at snf.stanford.edu Thu Jan 4 22:57:10 2007 From: fatihs at snf.stanford.edu (fatihs at snf.stanford.edu) Date: Thu, 4 Jan 2007 22:57:10 -0800 Subject: Problem svgcoat2 SNF 2007-01-04 22:57:10: coater doesn't work Message-ID: Rails don't approach each other to accept the wafger even in the manual mode. From vilanova at snf.stanford.edu Fri Jan 5 11:37:55 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Jan 2007 11:37:55 -0800 Subject: Problem svgcoat2 SNF 2007-01-04 17:48:51: 2 problems Message-ID: Air FLow was not strong enough to open the traveling belts and lower the Dispense Arm , Adjusted Air sensors and cycled wafers ( we've been cycling wafers for the last 2 hours) System working FIne, Ready to use. From vilanova at snf.stanford.edu Fri Jan 5 11:38:14 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Jan 2007 11:38:14 -0800 Subject: Problem svgcoat2 SNF 2007-01-04 22:44:59: Coater doesn't work Message-ID: Please Read Previous Message. From vilanova at snf.stanford.edu Fri Jan 5 11:38:29 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 5 Jan 2007 11:38:29 -0800 Subject: Problem svgcoat2 SNF 2007-01-04 22:57:10: coater doesn't work Message-ID: Please Read PRevious Message. From mahnaz at snf.stanford.edu Fri Jan 5 17:21:14 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 5 Jan 2007 17:21:14 -0800 Subject: Problem svgcoat2 SNF 2007-01-05 17:21:14: 220-7 thickness good uniformity needs Message-ID: improvment. From mahnaz at snf.stanford.edu Mon Jan 8 15:08:53 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 8 Jan 2007 15:08:53 -0800 Subject: Problem svgcoat2 SNF 2007-01-05 17:21:14: 220-7 thickness good uniformity needs Message-ID: I meant SVGcoat From vilanova at snf.stanford.edu Tue Jan 9 10:42:18 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Jan 2007 10:42:18 -0800 Subject: Shutdown svgcoat2 SNF 2007-01-09 10:42:17: Under Maintenance...... Message-ID: From vilanova at snf.stanford.edu Tue Jan 9 14:40:54 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Jan 2007 14:40:54 -0800 Subject: Shutdown svgcoat2 SNF 2007-01-09 10:42:17: Under Maintenance...... Message-ID: A Vacuum switch for the Coater lost the data I had to reset it again, I cycled wafers , ok to use. From dgunning at snf.stanford.edu Wed Jan 10 10:49:45 2007 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Wed, 10 Jan 2007 10:49:45 -0800 Subject: Problem svgcoat2 SNF 2007-01-10 10:49:45: wafer getting stuck Message-ID: wafer getting sstuck between first cool plate and coater station From vilanova at snf.stanford.edu Wed Jan 10 11:28:49 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 10 Jan 2007 11:28:49 -0800 Subject: Shutdown svgcoat2 SNF 2007-01-10 11:28:49: Under Maintenance....... Message-ID: From vilanova at snf.stanford.edu Wed Jan 10 13:36:13 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 10 Jan 2007 13:36:13 -0800 Subject: Shutdown svgcoat2 SNF 2007-01-10 11:28:49: Under Maintenance....... Message-ID: Adjusted Air Cylinder, Cycled wafers ok to use. From vilanova at snf.stanford.edu Wed Jan 10 13:36:31 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 10 Jan 2007 13:36:31 -0800 Subject: Problem svgcoat2 SNF 2007-01-10 10:49:45: wafer getting stuck Message-ID: Please read previous message. From tura at snf.stanford.edu Wed Jan 10 19:18:25 2007 From: tura at snf.stanford.edu (tura at snf.stanford.edu) Date: Wed, 10 Jan 2007 19:18:25 -0800 Subject: Comment svgcoat2 SNF 2007-01-10 19:18:25: wafers did not center Message-ID: None of my 6 wafers were centered correctly, therefore the EBR doesn't look uniform at all points. From vilanova at snf.stanford.edu Thu Jan 11 08:02:01 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 11 Jan 2007 08:02:01 -0800 Subject: Comment svgcoat2 SNF 2007-01-10 19:18:25: wafers did not center Message-ID: Aligned rail position, Calibrated Spindle, Cycle Wafers, Good to use. From mahnaz at snf.stanford.edu Mon Jan 15 14:44:39 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 15 Jan 2007 14:44:39 -0800 Subject: Shutdown svgcoat2 SNF 2007-01-15 14:44:38: Mary's C. wafer was spinning in the Message-ID: Catch cup for a while. I did coater stop, it would not stop. I asked het to disable the system still did not stop so I powerd it down. when powered it up the arm did not move out of the way and hit the chuck.. EBR nozzel damaged, this explain a lot of things to me now. that From mahnaz at snf.stanford.edu Tue Jan 16 17:16:13 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 16 Jan 2007 17:16:13 -0800 Subject: Shutdown svgcoat2 SNF 2007-01-15 14:44:38: Mary's C. wafer was spinning in the Message-ID: adjusted the distance of arm to the wafer and recenter the station. adjusted the EBR thickness. From dgunning at snf.stanford.edu Thu Jan 18 18:10:50 2007 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Thu, 18 Jan 2007 18:10:50 -0800 Subject: Problem svgcoat2 SNF 2007-01-18 18:10:50: receiving cassette sticking Message-ID: would only move to let one wafer process From vilanova at snf.stanford.edu Fri Jan 19 07:47:47 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 19 Jan 2007 07:47:47 -0800 Subject: Problem svgcoat2 SNF 2007-01-18 18:10:50: receiving cassette sticking Message-ID: operator error! Cycled 10 Wafers ( twice ) And system is working Fine, I could not repeat the problem.Ok to use.