Shutdown svgcoat2 SNF 2007-01-02 14:04:54: board Problem.

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Jan 4 16:03:40 PST 2007


Replaced broken Arm Stepper Motor, also replaced Burned
receiving Indexer Motor , Adjusted centering FLags , Adjusted and calibrated HPO ( post bake ) calibrated spindle, cycled
wafers , ready to use. 




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