Problem svgcoat2 SNF 2007-01-04 17:48:51: 2 problems

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Thu Jan 4 17:48:51 PST 2007


less serious, the receiver cassette mis-sensed on 2 out of about 10 wafers.
More serious:  the spinner showed a 2% low speed on dispense and would not continue.  I turned off power to recover my dripping wafer.   On restart, I could not get the track to spin another wafer.  Wafer starts but is not loaded on spinner.




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