Problem svgcoat2 SNF 2007-01-04 17:48:51: 2 problems
jimkruger at snf.stanford.edu
jimkruger at snf.stanford.edu
Thu Jan 4 17:48:51 PST 2007
less serious, the receiver cassette mis-sensed on 2 out of about 10 wafers.
More serious: the spinner showed a 2% low speed on dispense and would not continue. I turned off power to recover my dripping wafer. On restart, I could not get the track to spin another wafer. Wafer starts but is not loaded on spinner.
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