Shutdown svgcoat2 SNF 2007-01-09 10:42:17: Under Maintenance......

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Jan 9 14:40:54 PST 2007


A Vacuum switch  for the Coater lost the data I had to 
reset it again, I cycled wafers , ok to use. 




More information about the svgcoat2-pcs mailing list