Shutdown svgcoat2 SNF 2007-01-09 10:42:17: Under Maintenance......

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Jan 9 14:40:54 PST 2007

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A Vacuum switch  for the Coater lost the data I had to 
reset it again, I cycled wafers , ok to use.

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