Shutdown svgcoat2 SNF 2007-01-15 14:44:38: Mary's C. wafer was spinning in the

[mahnaz at snf.stanford.edu]

Catch cup for a while. I did coater stop, it would not stop.
I asked het to disable the system still did not stop so I powerd 
it  down. when powered it up the arm did not move out of the
 way and hit the chuck.. EBR nozzel damaged, this explain 
 a lot of things to me now.
 that