Problem svgcoat2 SNF 2007-01-18 18:10:50: receiving cassette sticking

dgunning at snf.stanford.edu dgunning at snf.stanford.edu
Thu Jan 18 18:10:50 PST 2007

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would only move to let one wafer process

Previous message: Shutdown svgcoat2 SNF 2007-01-15 14:44:38: Mary's C. wafer was spinning in the
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