Problem svgcoat2 SNF 2007-01-18 18:10:50: receiving cassette sticking

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jan 19 07:47:47 PST 2007

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operator error! Cycled 10 Wafers ( twice ) And system is
 working Fine, I could not repeat the problem.Ok to use.

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