From vilanova at snf.stanford.edu Mon Jul 2 07:50:16 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Jul 2007 07:50:16 -0700 Subject: Comment svgcoat2 SNF 2007-07-02 07:50:16: Resist On HMDS Hotplate Message-ID: I found the HMDS hotplate full of resist this morning no one "reported" this , I found A piece of broken wafer in the hotplate chamber , Cleaned hotplate, Tested ok , Good to use. From vipin at snf.stanford.edu Fri Jul 6 09:31:19 2007 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Fri, 6 Jul 2007 09:31:19 -0700 Subject: Problem svgcoat2 SNF 2007-07-06 09:31:18: problem Message-ID: Chuck seems to have some resist on it. From mahnaz at snf.stanford.edu Fri Jul 6 11:14:28 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 6 Jul 2007 11:14:28 -0700 Subject: Problem svgcoat2 SNF 2007-07-06 11:14:28: chuck needs clean Message-ID: i cleaned the hot plate but the chuck (coater) needs to be cleaned. From msuggs at snf.stanford.edu Fri Jul 6 22:29:52 2007 From: msuggs at snf.stanford.edu (msuggs at snf.stanford.edu) Date: Fri, 6 Jul 2007 22:29:52 -0700 Subject: Problem svgcoat2 SNF 2007-07-06 22:29:51: do not run wafer Message-ID: From gsosa at snf.stanford.edu Mon Jul 9 08:44:39 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 9 Jul 2007 08:44:39 -0700 Subject: Problem svgcoat2 SNF 2007-07-06 09:31:18: problem Message-ID: Cleaned the chuck and the hotplate. Tested system operation,All OK From gsosa at snf.stanford.edu Mon Jul 9 08:45:21 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 9 Jul 2007 08:45:21 -0700 Subject: Problem svgcoat2 SNF 2007-07-06 11:14:28: chuck needs clean Message-ID: Cleaned the chuck and the hotplate. Tested system operation. all OK. From gsosa at snf.stanford.edu Mon Jul 9 09:04:18 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 9 Jul 2007 09:04:18 -0700 Subject: Problem svgcoat2 SNF 2007-07-06 22:29:51: do not run wafer Message-ID: Tested track operation in auto with program 2 and 7. System ran ok. From lindaw at snf.stanford.edu Thu Jul 12 10:23:44 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 12 Jul 2007 10:23:44 -0700 Subject: Comment svgcoat2 SNF 2007-07-12 10:23:41: i am done and track is clean Message-ID: From jparker at snf.stanford.edu Mon Jul 30 13:09:21 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Mon, 30 Jul 2007 13:09:21 -0700 Subject: Problem svgcoat2 SNF 2007-07-30 13:09:20: Line1 "suckback" weak Message-ID: The "suckback" after resist 3612 is deposited using line 1 is very weak. This results in 1-7 drops of resist either on the edge of the wafer or in the far left trough where the lines sit when not in use. The drops are most noticable for a program that raises the resist lines immediately after ejecting the resist. Half the time this leaves a ~1/4 inch long bubble in line 1; the other half of the time this leaves a 1/2 to 1 inch long air bubble in line 1. (5-7 drips of 3612 resist drop out to make the 1 inch long bubble.) From vilanova at snf.stanford.edu Mon Jul 30 14:56:05 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 30 Jul 2007 14:56:05 -0700 Subject: Problem svgcoat2 SNF 2007-07-30 13:09:20: Line1 "suckback" weak Message-ID: Adjusted 3612 resist suck back , cycled wafers , ok to use. From fungus at snf.stanford.edu Tue Jul 31 23:16:44 2007 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Tue, 31 Jul 2007 23:16:44 -0700 Subject: Problem svgcoat2 SNF 2007-07-31 23:16:43: resist on hotplate Message-ID: wafer got stuck resist side to hotplate. Wafer was removed, but residule resist maybe still on plate.