Comment svgcoat2 SNF 2007-07-02 07:50:16: Resist On HMDS Hotplate

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Jul 2 07:50:16 PDT 2007


I found the HMDS hotplate full of resist this morning
no one "reported" this , I found A piece of broken wafer in the
hotplate chamber , Cleaned hotplate, Tested ok , Good to use.




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