Problem svgcoat2 SNF 2007-07-30 13:09:20: Line1 "suckback" weak

jparker at snf.stanford.edu jparker at snf.stanford.edu
Mon Jul 30 13:09:21 PDT 2007


The "suckback" after resist 3612 is deposited using line 1 is very weak. This results in 1-7 drops of resist either on the edge of the wafer or in the far left trough where the lines sit when not in use. The drops are most noticable for a program that raises the resist lines immediately after ejecting the resist.
Half the time this leaves a ~1/4 inch long bubble in line 1; the other half of the time this leaves a 1/2 to 1 inch long air bubble in line 1. (5-7 drips of 3612 resist drop out to make the 1 inch long bubble.)




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