From uyoon at snf.stanford.edu  Mon Jun  4 09:53:05 2007
From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu)
Date: Mon, 4 Jun 2007 09:53:05 -0700
Subject: Comment svgcoat2 SNF 2007-06-04 09:53:05: 
Message-ID: <mailman.134.1356283430.4703.svgcoat2-pcs@snf.stanford.edu>

broken wafer  pieces in the cup hold needs to be cleaned



From vilanova at snf.stanford.edu  Tue Jun  5 07:59:02 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 5 Jun 2007 07:59:02 -0700
Subject: Comment svgcoat2 SNF 2007-06-04 09:53:05: 
Message-ID: <mailman.135.1356283430.4703.svgcoat2-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Tue Jun 12 16:07:46 2007
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 12 Jun 2007 16:07:46 -0700
Subject: Shutdown svgcoat2 SNF 2007-06-12 16:07:46: Spindle motor needs replacement
Message-ID: <mailman.136.1356283430.4703.svgcoat2-pcs@snf.stanford.edu>

Cannot calibrate spin speed. Motor speed fluctuates and gives poor coatings. 



From gsosa at snf.stanford.edu  Wed Jun 13 11:41:06 2007
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 13 Jun 2007 11:41:06 -0700
Subject: Shutdown svgcoat2 SNF 2007-06-12 16:07:46: Spindle motor needs replacement
Message-ID: <mailman.137.1356283430.4703.svgcoat2-pcs@snf.stanford.edu>

Replaced the spindle motor. Calibrated spindle. Tested track operation. All OK.



From mahnaz at snf.stanford.edu  Thu Jun 14 09:05:18 2007
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 14 Jun 2007 09:05:18 -0700
Subject: Problem svgcoat2 SNF 2007-06-14 09:05:18: key pad need to be replaced
Message-ID: <mailman.138.1356283430.4703.svgcoat2-pcs@snf.stanford.edu>

very very hard to change values



From king at snf.stanford.edu  Mon Jun 18 16:08:18 2007
From: king at snf.stanford.edu (king at snf.stanford.edu)
Date: Mon, 18 Jun 2007 16:08:18 -0700
Subject: Problem svgcoat2 SNF 2007-06-18 16:08:17: 1312, 1um - nonuniform coat; tried the usual fixes
Message-ID: <mailman.139.1356283430.4703.svgcoat2-pcs@snf.stanford.edu>

gave up, trying the other track



From vilanova at snf.stanford.edu  Tue Jun 19 08:00:57 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 19 Jun 2007 08:00:57 -0700
Subject: Problem svgcoat2 SNF 2007-06-18 16:08:17: 1312, 1um - nonuniform coat; tried the usual fixes
Message-ID: <mailman.140.1356283430.4703.svgcoat2-pcs@snf.stanford.edu>

Cleaned up  & adjusted resist dispense hose purged Line,
Cycled wafers, God Uniformity , Ready to use.