Problem svgcoat2 SNF 2007-06-14 09:05:18: key pad need to be replaced
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Thu Jun 14 09:05:18 PDT 2007
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Shutdown svgcoat2 SNF 2007-06-12 16:07:46: Spindle motor needs replacement
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Problem svgcoat2 SNF 2007-06-18 16:08:17: 1312, 1um - nonuniform coat; tried the usual fixes
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very very hard to change values
Previous message:
Shutdown svgcoat2 SNF 2007-06-12 16:07:46: Spindle motor needs replacement
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Problem svgcoat2 SNF 2007-06-18 16:08:17: 1312, 1um - nonuniform coat; tried the usual fixes
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