Problem svgcoat2 SNF 2007-06-18 16:08:17: 1312, 1um - nonuniform coat; tried the usual fixes

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Jun 19 08:00:57 PDT 2007


Cleaned up  & adjusted resist dispense hose purged Line,
Cycled wafers, God Uniformity , Ready to use. 




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