From lindaw at snf.stanford.edu Thu Mar 1 10:45:14 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 1 Mar 2007 10:45:14 -0800 Subject: Problem svgcoat2 SNF 2007-03-01 10:45:13: wafer spins for three minutes before dispense Message-ID: Problem with the arm program? Also, after wafer spins for the normal 30 sec after dispense, wafer continues to spin for a very long time while the controller says that the process is at step 5 (end). This is all happening in program 2. Blar!!! From vilanova at snf.stanford.edu Thu Mar 1 14:47:14 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Mar 2007 14:47:14 -0800 Subject: Problem svgcoat2 SNF 2007-03-01 10:45:13: wafer spins for three minutes before dispense Message-ID: checked arm programs they al seem to be ok, the problem with the wafer rotating for more than 3 minutes was that a vacuum hose came off, I put it back in , cycled wafers , ok to use, I also replaced an empty resist bottle and purged line. From calarrudo at snf.stanford.edu Fri Mar 2 12:58:03 2007 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Fri, 2 Mar 2007 12:58:03 -0800 Subject: Problem svgcoat2 SNF 2007-03-02 12:58:02: won't coat wafer Message-ID: From vilanova at snf.stanford.edu Fri Mar 2 14:27:06 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 2 Mar 2007 14:27:06 -0800 Subject: Problem svgcoat2 SNF 2007-03-02 12:58:02: won't coat wafer Message-ID: Coater runnign fine but we will keep an eye on it because the vacuum and the air was pretty weak during one of the cycles. From grahamab at snf.stanford.edu Mon Mar 5 08:53:44 2007 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 5 Mar 2007 08:53:44 -0800 Subject: Comment svgcoat2 SNF 2007-03-05 08:53:42: coater spinning wafer and nothing else Message-ID: program 2: takes the wafer, starts spinning, never goes to the next step From vilanova at snf.stanford.edu Mon Mar 5 09:25:43 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Mar 2007 09:25:43 -0800 Subject: Shutdown svgcoat2 SNF 2007-03-05 09:25:43: under maintenance..... Message-ID: From vilanova at snf.stanford.edu Tue Mar 6 10:16:57 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 6 Mar 2007 10:16:57 -0800 Subject: Comment svgcoat2 SNF 2007-03-05 08:53:42: coater spinning wafer and nothing else Message-ID: repair completed, cycled wafers , ok to use. From vilanova at snf.stanford.edu Tue Mar 6 10:17:26 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 6 Mar 2007 10:17:26 -0800 Subject: Shutdown svgcoat2 SNF 2007-03-05 09:25:43: under maintenance..... Message-ID: repair completed, replaced broken air solenoid valve, cycled wafers , ok to use. From hyunjoo at snf.stanford.edu Fri Mar 9 03:50:14 2007 From: hyunjoo at snf.stanford.edu (hyunjoo at snf.stanford.edu) Date: Fri, 9 Mar 2007 03:50:14 -0800 Subject: Problem svgcoat2 SNF 2007-03-09 03:50:13: Same mark on the wafer after PR Message-ID: There seems to be little dent in the PR on the corner near EBR region - consistent in all three wafers I coated. From vilanova at snf.stanford.edu Fri Mar 9 07:38:47 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Mar 2007 07:38:47 -0800 Subject: Problem svgcoat2 SNF 2007-03-09 03:50:13: Same mark on the wafer after PR Message-ID: I adjusted the EBR and Resist dispense air pressure , I cycled some wafers, ok to use. From sjo at snf.stanford.edu Tue Mar 13 20:47:17 2007 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Tue, 13 Mar 2007 20:47:17 -0700 Subject: Problem svgcoat2 SNF 2007-03-13 20:47:16: Resist arm snaps down, bounces Message-ID: The resist nozzle arm snaps down so fast and low that I am worried it'll hit the wafer. It also snaps and bounces so hard when it moves down that it shakes off a drop of resist (don't even know which resist) before the actual coating begins. The arm should stop slightly higher and move down more gently. From sjo at snf.stanford.edu Tue Mar 13 20:53:25 2007 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Tue, 13 Mar 2007 20:53:25 -0700 Subject: Problem svgcoat2 SNF 2007-03-13 20:53:24: Whiplash & spurting Message-ID: The resist arm snaps down so hard, it spurts resist from the nozzles every time. For the main coating this doesn't matter since normal resist flow follows, but when the arm comes back to do EBR, the extra resist drops cause uneven resist splatters near the wafer edge. From vilanova at snf.stanford.edu Wed Mar 14 13:47:10 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 14 Mar 2007 13:47:10 -0700 Subject: Problem svgcoat2 SNF 2007-03-13 20:47:16: Resist arm snaps down, bounces Message-ID: adjusted EBR and dispense hose air pressure Cycled wafers , ok to use. EBR is within 2mm Spec From vilanova at snf.stanford.edu Wed Mar 14 13:47:25 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 14 Mar 2007 13:47:25 -0700 Subject: Problem svgcoat2 SNF 2007-03-13 20:53:24: Whiplash & spurting Message-ID: Please read previous message. From rcordova at snf.stanford.edu Fri Mar 23 09:32:44 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Fri, 23 Mar 2007 09:32:44 -0700 Subject: Problem svgcoat2 SNF 2007-03-23 09:32:44: Suckback may need adjust. Message-ID: Seeing an airbubble being sucked back into the resist line after dispense. I ran the 20 dispense purge program prior and still seeing the bubble just inside the line. From rcordova at snf.stanford.edu Fri Mar 23 09:33:57 2007 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Fri, 23 Mar 2007 09:33:57 -0700 Subject: Comment svgcoat2 SNF 2007-03-23 09:33:54: Suckback adjust Message-ID: Sorry, forgot to say which line! Dispense 1 for 3612 resist. Seeing a bubble sucked back into the line. From mahnaz at snf.stanford.edu Fri Mar 23 11:27:00 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 23 Mar 2007 11:27:00 -0700 Subject: Comment svgcoat2 SNF 2007-03-23 09:33:54: Suckback adjust Message-ID: ran test looks good. From mahnaz at snf.stanford.edu Fri Mar 23 11:27:21 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 23 Mar 2007 11:27:21 -0700 Subject: Problem svgcoat2 SNF 2007-03-23 09:32:44: Suckback may need adjust. Message-ID: purged the line. From jhpark9 at snf.stanford.edu Sun Mar 25 17:01:59 2007 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Sun, 25 Mar 2007 17:01:59 -0700 Subject: Problem svgcoat2 SNF 2007-03-25 17:01:58: transfer problem Message-ID: Somehow it doesn't transfer wafers from cassette to the next stage. From jhpark9 at snf.stanford.edu Sun Mar 25 20:52:34 2007 From: jhpark9 at snf.stanford.edu (jhpark9 at snf.stanford.edu) Date: Sun, 25 Mar 2007 20:52:34 -0700 Subject: Comment svgcoat2 SNF 2007-03-25 20:52:34: It's working now Message-ID: From vilanova at snf.stanford.edu Mon Mar 26 06:38:20 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Mar 2007 06:38:20 -0700 Subject: Problem svgcoat2 SNF 2007-03-25 17:01:58: transfer problem Message-ID: Cleared problem. From vilanova at snf.stanford.edu Mon Mar 26 06:38:31 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Mar 2007 06:38:31 -0700 Subject: Comment svgcoat2 SNF 2007-03-25 20:52:34: It's working now Message-ID: cleared comment. From dgunning at snf.stanford.edu Mon Mar 26 23:57:31 2007 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Mon, 26 Mar 2007 23:57:31 -0700 Subject: Problem svgcoat2 SNF 2007-03-26 23:57:31: 1.6um Message-ID: lots of air in 1.6um line From vilanova at snf.stanford.edu Tue Mar 27 09:16:51 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 Mar 2007 09:16:51 -0700 Subject: Problem svgcoat2 SNF 2007-03-26 23:57:31: 1.6um Message-ID: Purge Line and cycled wafer , Good to use. From rik at snf.stanford.edu Tue Mar 27 15:37:47 2007 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Tue, 27 Mar 2007 15:37:47 -0700 Subject: Problem svgcoat2 SNF 2007-03-27 15:37:47: stage controller malfunctioning Message-ID: the wafer sender does not shift down, causing the system to beep on every wafer (or every other). the quick fix is to hit "wafer lost" on the HMDS panel. From vilanova at snf.stanford.edu Wed Mar 28 07:44:57 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 28 Mar 2007 07:44:57 -0700 Subject: Problem svgcoat2 SNF 2007-03-27 15:37:47: stage controller malfunctioning Message-ID: we found the HMDS hotplate full of resist and also some of the dummy wafers had resist on the back , cleaned hotplate & dummy wafers cycled 10 wafers , ok to use.