Problem svgcoat2 SNF 2007-03-01 10:45:13: wafer spins for three minutes before dispense

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Thu Mar 1 10:45:14 PST 2007


Problem with the arm program?  Also, after wafer spins for the normal 30 sec after dispense, wafer continues to spin for a very long time while the controller says that the process is at step 5 (end).  This is all happening in program 2.  Blar!!!




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