Problem svgcoat2 SNF 2007-03-01 10:45:13: wafer spins for three minutes before dispense

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Mar 1 14:47:14 PST 2007


checked arm programs they al seem to be ok, the problem 
with the wafer rotating for more than 3 minutes was that a 
vacuum hose came off, I put it back in , cycled wafers , ok to 
use, I also replaced an empty resist bottle and purged line. 




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