Problem svgcoat2 SNF 2007-03-01 10:45:13: wafer spins for three minutes before dispense

[vilanova at snf.stanford.edu]

checked arm programs they al seem to be ok, the problem 
with the wafer rotating for more than 3 minutes was that a 
vacuum hose came off, I put it back in , cycled wafers , ok to 
use, I also replaced an empty resist bottle and purged line.