Problem svgcoat2 SNF 2007-03-02 12:58:02: won't coat wafer

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Mar 2 14:27:06 PST 2007


Coater runnign fine but we will keep an eye on it because
the vacuum and the air was pretty weak during one of the 
cycles. 




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