Problem svgcoat2 SNF 2007-03-09 03:50:13: Same mark on the wafer after PR

hyunjoo at snf.stanford.edu hyunjoo at snf.stanford.edu
Fri Mar 9 03:50:14 PST 2007

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There seems to be little dent in the PR on the corner near EBR region - consistent in all three wafers I coated.

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