Problem svgcoat2 SNF 2007-03-13 20:47:16: Resist arm snaps down, bounces

sjo at snf.stanford.edu sjo at snf.stanford.edu
Tue Mar 13 20:47:17 PDT 2007


The resist nozzle arm snaps down so fast and low that I am worried it'll hit the wafer. It also snaps and bounces so hard when it moves down that it shakes off a drop of resist (don't even know which resist) before the actual coating begins. The arm should stop slightly higher and move down more gently.




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