Problem svgcoat2 SNF 2007-03-13 20:53:24: Whiplash & spurting

sjo at snf.stanford.edu sjo at snf.stanford.edu
Tue Mar 13 20:53:25 PDT 2007


The resist arm snaps down so hard, it spurts resist from the nozzles every time. For the main coating this doesn't matter since normal resist flow follows, but when the arm comes back to do EBR, the extra resist drops cause uneven resist splatters near the wafer edge.




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