Problem svgcoat2 SNF 2007-03-13 20:47:16: Resist arm snaps down, bounces

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Mar 14 13:47:10 PDT 2007


adjusted EBR and dispense hose air pressure
Cycled wafers , ok to use. 
EBR is within  2mm Spec 




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