Problem svgcoat2 SNF 2007-03-25 17:01:58: transfer problem
jhpark9 at snf.stanford.edu
jhpark9 at snf.stanford.edu
Sun Mar 25 17:01:59 PDT 2007
Somehow it doesn't transfer wafers from cassette to the next stage.
More information about the svgcoat2-pcs
mailing list