Problem svgcoat2 SNF 2007-03-27 15:37:47: stage controller malfunctioning

rik at snf.stanford.edu rik at snf.stanford.edu
Tue Mar 27 15:37:47 PDT 2007


the wafer sender does not shift down, causing the system to beep on every wafer (or every other). the quick fix is to hit "wafer lost" on the HMDS panel. 




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