Problem svgcoat2 SNF 2007-03-27 15:37:47: stage controller malfunctioning

vilanova at vilanova at
Wed Mar 28 07:44:57 PDT 2007

we found the HMDS hotplate  full of resist and also  some of the dummy wafers had resist on the back , cleaned hotplate & 
dummy wafers cycled 10 wafers , ok to use. 

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