From jsuarez at snf.stanford.edu  Tue May  8 14:14:23 2007
From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu)
Date: Tue, 8 May 2007 14:14:23 -0700
Subject: Problem svgcoat2 SNF 2007-05-08 14:14:22: EBR not clean
Message-ID: <mailman.126.1356283430.4703.svgcoat2-pcs@snf.stanford.edu>

Resist streaks left on EBR



From gsosa at snf.stanford.edu  Tue May  8 15:28:32 2007
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 8 May 2007 15:28:32 -0700
Subject: Problem svgcoat2 SNF 2007-05-08 14:14:22: EBR not clean
Message-ID: <mailman.127.1356283430.4703.svgcoat2-pcs@snf.stanford.edu>

Checked canister pressure- OK. Checked and adjusted EBR width. 



From mislam at snf.stanford.edu  Sun May 13 10:23:45 2007
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Sun, 13 May 2007 10:23:45 -0700
Subject: Problem svgcoat2 SNF 2007-05-13 10:23:44: Resist lifting
Message-ID: <mailman.128.1356283430.4703.svgcoat2-pcs@snf.stanford.edu>

Priming station not working? Others have reported
lifting problem on Friday.



From vilanova at snf.stanford.edu  Tue May 15 10:51:35 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Tue, 15 May 2007 10:51:35 -0700
Subject: Problem svgcoat2 SNF 2007-05-13 10:23:44: Resist lifting
Message-ID: <mailman.129.1356283430.4703.svgcoat2-pcs@snf.stanford.edu>

I Cycled many wafers ( 7  each ) exposed them ( Ev Aligner)
and develop them, All of them came out good , no lifting , we'll
keep an eye on it to see if this  happens again. Ok to use. 



From mtang at snf.stanford.edu  Thu May 17 09:35:11 2007
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Thu, 17 May 2007 09:35:11 -0700
Subject: Problem svgcoat2 SNF 2007-05-17 09:35:11: Possible HMDS Problem
Message-ID: <mailman.130.1356283430.4703.svgcoat2-pcs@snf.stanford.edu>

Users have reported lifting problems.  Gary is investigating.



From gsosa at snf.stanford.edu  Fri May 18 15:50:42 2007
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 18 May 2007 15:50:42 -0700
Subject: Comment svgcoat2 SNF 2007-05-18 15:50:41: Vapor Prime Module
Message-ID: <mailman.131.1356283430.4703.svgcoat2-pcs@snf.stanford.edu>

Vapor prime tested OK on bare silicon wafers. System OK to   use on silicon wafers only. Do not use the track vapor prime   on other substrates. Will continue to troubleshoot the vapor      prime as time allows.  



From mrlin at snf.stanford.edu  Wed May 23 17:45:56 2007
From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu)
Date: Wed, 23 May 2007 17:45:56 -0700
Subject: Problem svgcoat2 SNF 2007-05-23 17:45:55: ebr
Message-ID: <mailman.132.1356283430.4703.svgcoat2-pcs@snf.stanford.edu>

the ebr seems to not give a clean bead, and also splash onto the wafer (left side).
details: track 2 ; program coat #7, bake #1. I noticed this issue consistently on two run on different days.



From gsosa at snf.stanford.edu  Thu May 24 08:18:34 2007
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 24 May 2007 08:18:34 -0700
Subject: Problem svgcoat2 SNF 2007-05-23 17:45:55: ebr
Message-ID: <mailman.133.1356283430.4703.svgcoat2-pcs@snf.stanford.edu>

Checked canister pressure and level- All OK. Checked program- OK. Tested EBR with several wafers(prog 7) All looks OK.