Comment svgcoat2 SNF 2007-05-18 15:50:41: Vapor Prime Module

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri May 18 15:50:42 PDT 2007

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Vapor prime tested OK on bare silicon wafers. System OK to   use on silicon wafers only. Do not use the track vapor prime   on other substrates. Will continue to troubleshoot the vapor      prime as time allows.

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