Problem svgcoat2 SNF 2007-05-23 17:45:55: ebr

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu May 24 08:18:34 PDT 2007

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Checked canister pressure and level- All OK. Checked program- OK. Tested EBR with several wafers(prog 7) All looks OK.

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