From linyoucao at snf.stanford.edu Thu Nov 1 01:57:33 2007 From: linyoucao at snf.stanford.edu (linyoucao at snf.stanford.edu) Date: Thu, 1 Nov 2007 01:57:33 -0700 Subject: Problem svgcoat2 SNF 2007-11-01 01:57:32: DIPS 3 coating void Message-ID: A void around 3-5mm size without any coating always comes out at the center From vilanova at snf.stanford.edu Thu Nov 1 07:54:53 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Nov 2007 07:54:53 -0700 Subject: Problem svgcoat2 SNF 2007-11-01 01:57:32: DIPS 3 coating void Message-ID: adjusted dispense rate flow, cycled wafers, uniformity looks good, ready to use. From vilanova at snf.stanford.edu Thu Nov 1 08:11:22 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Nov 2007 08:11:22 -0700 Subject: Shutdown svgcoat2 SNF 2007-11-01 08:11:21: Under maintenance ............... Message-ID: From vilanova at snf.stanford.edu Thu Nov 1 14:47:29 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Nov 2007 14:47:29 -0700 Subject: Shutdown svgcoat2 SNF 2007-11-01 08:11:21: Under maintenance ............... Message-ID: WE JUST COMPLETED THE MAINTENANCE MONTHLY ROUTINE, REPLACED & REPAIRED ,CALIBRATED NOISY SPINDLE,CALIBRATED HOTPLATES, CLEANED CATCH CUP, CYCLED WAFERS, READY TO USE. From vilanova at snf.stanford.edu Thu Nov 1 14:47:42 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Nov 2007 14:47:42 -0700 Subject: Problem svgcoat2 SNF 2007-10-31 15:22:10: Track 2 Coat Message-ID: WE JUST COMPLETED THE MAINTENANCE MONTHLY ROUTINE, REPLACED & REPAIRED ,CALIBRATED NOISY SPINDLE,CALIBRATED HOTPLATES, CLEANED CATCH CUP, CYCLED WAFERS, READY TO USE. From jsuarez at snf.stanford.edu Fri Nov 2 13:54:08 2007 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Fri, 2 Nov 2007 13:54:08 -0700 Subject: Comment svgcoat2 SNF 2007-11-02 13:54:07: streaks on EBR Message-ID: Resist streaks on EBR - Program 7 From vilanova at snf.stanford.edu Mon Nov 5 07:38:27 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Nov 2007 07:38:27 -0800 Subject: Comment svgcoat2 SNF 2007-11-02 13:54:07: streaks on EBR Message-ID: there was an air bubble in the dispense line, puurged line and cycled wafers, uniformity looks good, ok to use. From vilanova at snf.stanford.edu Thu Nov 8 10:35:21 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 8 Nov 2007 10:35:21 -0800 Subject: Shutdown svgcoat2 SNF 2007-11-08 10:35:20: shutdown for repairs Message-ID: From vilanova at snf.stanford.edu Thu Nov 8 12:04:41 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 8 Nov 2007 12:04:41 -0800 Subject: Shutdown svgcoat2 SNF 2007-11-08 10:35:20: shutdown for repairs Message-ID: Maintenance Completed. From vilanova at snf.stanford.edu Fri Nov 9 10:23:21 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 9 Nov 2007 10:23:21 -0800 Subject: Comment svgcoat2 SNF 2007-09-27 10:45:45: centering tabs adjusted Message-ID: cleared From acremann at snf.stanford.edu Sun Nov 11 16:38:31 2007 From: acremann at snf.stanford.edu (acremann at snf.stanford.edu) Date: Sun, 11 Nov 2007 16:38:31 -0800 Subject: Problem svgcoat2 SNF 2007-11-11 16:38:30: Needs reset? Message-ID: The receiving cassette holder is down and the system is confused. Needs a reset? From acremann at snf.stanford.edu Sun Nov 11 17:25:43 2007 From: acremann at snf.stanford.edu (acremann at snf.stanford.edu) Date: Sun, 11 Nov 2007 17:25:43 -0800 Subject: Comment svgcoat2 SNF 2007-11-11 17:25:42: everything OK Message-ID: I got help with the confused controller. Everything is OK. From vilanova at snf.stanford.edu Mon Nov 12 06:52:43 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Nov 2007 06:52:43 -0800 Subject: Problem svgcoat2 SNF 2007-11-11 16:38:30: Needs reset? Message-ID: User Reseted machine From vilanova at snf.stanford.edu Mon Nov 12 06:52:49 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 12 Nov 2007 06:52:49 -0800 Subject: Comment svgcoat2 SNF 2007-11-11 17:25:42: everything OK Message-ID: Cleared. From ndhuang at snf.stanford.edu Wed Nov 14 13:04:47 2007 From: ndhuang at snf.stanford.edu (ndhuang at snf.stanford.edu) Date: Wed, 14 Nov 2007 13:04:47 -0800 Subject: Problem svgcoat2 SNF 2007-11-14 13:04:46: dummy wafer stuck Message-ID: wafer stuck at hot plate. maybe there is photoresist on the back side. From vilanova at snf.stanford.edu Wed Nov 14 13:35:40 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 14 Nov 2007 13:35:40 -0800 Subject: Problem svgcoat2 SNF 2007-11-14 13:04:46: dummy wafer stuck Message-ID: removed wafer, cleaned hotplate, ready to use. From vilanova at snf.stanford.edu Thu Nov 15 10:37:57 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 15 Nov 2007 10:37:57 -0800 Subject: Shutdown svgcoat2 SNF 2007-11-15 10:37:56: maintenance....... Message-ID: From vilanova at snf.stanford.edu Thu Nov 15 10:41:14 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 15 Nov 2007 10:41:14 -0800 Subject: Shutdown svgcoat2 SNF 2007-11-15 10:37:56: maintenance....... Message-ID: I will replace the keypad later , theres people trying to use it. From vilanova at snf.stanford.edu Thu Nov 15 15:08:09 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 15 Nov 2007 15:08:09 -0800 Subject: Comment svgcoat2 SNF 2007-11-15 15:08:08: REPLACED DEFECTIVE KEYPAD Message-ID: REPLACED DEFECTIVE KEYPAD, NOW ALL THE BUTTON ARE WORKING PERFECTLY FINE, PLEASE USE YOUR FINGERS TO ENTER YOUR PROGRAMS, PLEASE DO NOT USE YOUR TWEEZERS OR YOU WILL HAVE TO SEE MAHNAZ. From kimsangb at snf.stanford.edu Tue Nov 20 14:02:28 2007 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Tue, 20 Nov 2007 14:02:28 -0800 Subject: Problem svgcoat2 SNF 2007-11-20 14:02:28: HPO/VP VAC. BREAK START? Message-ID: Continoulsly generating beeping sound when wafers move to the next station. It says "HPO/VP VAC. BREAK START?" on the oven screen. From jxs136 at snf.stanford.edu Wed Nov 21 12:56:25 2007 From: jxs136 at snf.stanford.edu (jxs136 at snf.stanford.edu) Date: Wed, 21 Nov 2007 12:56:25 -0800 Subject: Problem svgcoat2 SNF 2007-11-21 12:56:24: Dropping & non-uniform coating Message-ID: The spin coater got additional dropping (perhaps resist) at the last few steps of spincoating, also got not very uniform resist coat. Asked Gary for help. He tried to fix and problem. Evetually look acceptable by manual operation. While after he left, I tried several dummy wafers. The probelms are still there. From gsosa at snf.stanford.edu Mon Nov 26 09:04:05 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 26 Nov 2007 09:04:05 -0800 Subject: Shutdown svgcoat2 SNF 2007-11-26 09:04:05: Poor Spin Message-ID: Working on poor spin problem From gsosa at snf.stanford.edu Mon Nov 26 15:39:26 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 26 Nov 2007 15:39:26 -0800 Subject: Shutdown svgcoat2 SNF 2007-11-26 09:04:05: Poor Spin Message-ID: Checked and adjusted wafer centering. Checked and adjusted top EBR flow. Cleaned nozzles. From vilanova at snf.stanford.edu Tue Nov 27 07:50:34 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 Nov 2007 07:50:34 -0800 Subject: Problem svgcoat2 SNF 2007-11-20 14:02:28: HPO/VP VAC. BREAK START? Message-ID: hecked and adjusted wafer centering. Checked and adjusted top EBR flow. Cleaned nozzles. From vilanova at snf.stanford.edu Tue Nov 27 07:50:41 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 Nov 2007 07:50:41 -0800 Subject: Problem svgcoat2 SNF 2007-11-21 12:56:24: Dropping & non-uniform coating Message-ID: hecked and adjusted wafer centering. Checked and adjusted top EBR flow. Cleaned nozzles. From shanewang at snf.stanford.edu Tue Nov 27 11:01:37 2007 From: shanewang at snf.stanford.edu (shanewang at snf.stanford.edu) Date: Tue, 27 Nov 2007 11:01:37 -0800 Subject: Problem svgcoat2 SNF 2007-11-27 11:01:36: Uniformity bad for svgcoat2 Message-ID: as title From mahnaz at snf.stanford.edu Tue Nov 27 11:21:15 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 27 Nov 2007 11:21:15 -0800 Subject: Problem svgcoat2 SNF 2007-11-27 11:21:14: receiver is not indexing correctly Message-ID: bad uniformity as well. NEED HELP. From vilanova at snf.stanford.edu Wed Nov 28 11:02:24 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 28 Nov 2007 11:02:24 -0800 Subject: Comment svgcoat2 SNF 2007-11-28 11:02:23: still working on some issues on back track.......... Message-ID: From vilanova at snf.stanford.edu Thu Nov 29 10:56:25 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 29 Nov 2007 10:56:25 -0800 Subject: Shutdown svgcoat2 SNF 2007-11-29 10:56:24: Working On Vacuum sensor problem.... Message-ID: From gsosa at snf.stanford.edu Fri Nov 30 11:42:25 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 30 Nov 2007 11:42:25 -0800 Subject: Shutdown svgcoat2 SNF 2007-11-29 10:56:24: Working On Vacuum sensor problem.... Message-ID: Replaced vacuum sensor on bake module. Vacuum sensors for bake and chill plate unresponsive. Troubleshot CPU board and replaced 2 bufer chips. Checked complete system operation. All tested OK. System OK to use. From gsosa at snf.stanford.edu Fri Nov 30 11:43:02 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 30 Nov 2007 11:43:02 -0800 Subject: Comment svgcoat2 SNF 2007-11-28 11:02:23: still working on some issues on back track.......... Message-ID: Replaced vacuum sensor on bake module. Vacuum sensors for bake and chill plate unresponsive. Troubleshot CPU board and replaced 2 bufer chips. Checked complete system operation. All tested OK. System OK to use. From gsosa at snf.stanford.edu Fri Nov 30 11:43:19 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 30 Nov 2007 11:43:19 -0800 Subject: Problem svgcoat2 SNF 2007-11-27 11:21:14: receiver is not indexing correctly Message-ID: Replaced vacuum sensor on bake module. Vacuum sensors for bake and chill plate unresponsive. Troubleshot CPU board and replaced 2 bufer chips. Checked complete system operation. All tested OK. System OK to use. From gsosa at snf.stanford.edu Fri Nov 30 11:44:48 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 30 Nov 2007 11:44:48 -0800 Subject: Problem svgcoat2 SNF 2007-11-27 11:01:36: Uniformity bad for svgcoat2 Message-ID: Cleaned nozzles. Purged dispense lines. tested with dummy wafers. All looks good From kimsangb at snf.stanford.edu Fri Nov 30 13:10:53 2007 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Fri, 30 Nov 2007 13:10:53 -0800 Subject: Problem svgcoat2 SNF 2007-11-30 13:10:52: Keypads are not working Message-ID: There are several number keypads (ex. 2, 6) that do not work.