Comment svgcoat2 SNF 2007-11-02 13:54:07: streaks on EBR

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Nov 5 07:38:27 PST 2007


there was an air bubble in the dispense line, puurged line
and cycled wafers, uniformity looks good, ok to use. 




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