Problem svgcoat2 SNF 2007-11-14 13:04:46: dummy wafer stuck
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Wed Nov 14 13:35:40 PST 2007
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Problem svgcoat2 SNF 2007-11-14 13:04:46: dummy wafer stuck
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Shutdown svgcoat2 SNF 2007-11-15 10:37:56: maintenance.......
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removed wafer, cleaned hotplate, ready to use.
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Problem svgcoat2 SNF 2007-11-14 13:04:46: dummy wafer stuck
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Shutdown svgcoat2 SNF 2007-11-15 10:37:56: maintenance.......
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