Problem svgcoat2 SNF 2007-11-20 14:02:28: HPO/VP VAC. BREAK START?

kimsangb at snf.stanford.edu kimsangb at snf.stanford.edu
Tue Nov 20 14:02:28 PST 2007

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Continoulsly generating beeping sound when wafers move to the next station. It says "HPO/VP VAC. BREAK START?" on the oven screen.

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