Problem svgcoat2 SNF 2007-11-21 12:56:24: Dropping & non-uniform coating

jxs136 at snf.stanford.edu jxs136 at snf.stanford.edu
Wed Nov 21 12:56:25 PST 2007


The spin coater got additional dropping (perhaps resist) at the last few steps of spincoating, also got not very uniform resist coat. Asked Gary for help. He tried to fix and problem. Evetually look acceptable by manual operation. While after he left, I tried several dummy wafers. The probelms are still there.




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