From mrlin at snf.stanford.edu Tue Oct 2 16:43:19 2007 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Tue, 2 Oct 2007 16:43:19 -0700 Subject: Problem svgcoat2 SNF 2007-10-02 16:43:18: splashback Message-ID: a bit of splashback while EBR for 2 out of 4 wafers From mrlin at snf.stanford.edu Tue Oct 2 16:44:07 2007 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Tue, 2 Oct 2007 16:44:07 -0700 Subject: Problem svgcoat2 SNF 2007-10-02 16:44:07: drip Message-ID: some resist drips during EBR for 1 out of 4 wafers From vilanova at snf.stanford.edu Wed Oct 3 07:51:35 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 3 Oct 2007 07:51:35 -0700 Subject: Problem svgcoat2 SNF 2007-10-02 16:43:18: splashback Message-ID: the resist bottle was empty, replaced the bottle, purged line cycled wafers, teste came out good, ready to use. From vilanova at snf.stanford.edu Wed Oct 3 07:51:42 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 3 Oct 2007 07:51:42 -0700 Subject: Problem svgcoat2 SNF 2007-10-02 16:44:07: drip Message-ID: the resist bottle was empty, replaced the bottle, purged line cycled wafers, teste came out good, ready to use. From jrjain at snf.stanford.edu Fri Oct 5 15:58:59 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Fri, 5 Oct 2007 15:58:59 -0700 Subject: Problem svgcoat2 SNF 2007-10-05 15:58:58: EBR backsplash Message-ID: From vilanova at snf.stanford.edu Mon Oct 8 07:56:53 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Oct 2007 07:56:53 -0700 Subject: Problem svgcoat2 SNF 2007-10-05 15:58:58: EBR backsplash Message-ID: The problem WAS NOT EBR SPLASH! , FOund air in the dispense line probably someone replaced the bottle and didnt purged the line, sometimes running just a couple of wafers doesnt help because the amount of resist for each wafer is minimum , please purged line before Use, Cycled wafers, ready to use. From mrobles at snf.stanford.edu Fri Oct 12 10:56:49 2007 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 12 Oct 2007 10:56:49 -0700 Subject: Shutdown svgcoat2 SNF 2007-10-12 10:56:47: Upstream not ready errors on Message-ID: coater and oven displays. Cannot change program on either console. From mrobles at snf.stanford.edu Fri Oct 12 11:01:09 2007 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 12 Oct 2007 11:01:09 -0700 Subject: Comment svgcoat2 SNF 2007-10-12 11:01:08: The shutdown was meant to be for svgcoat Message-ID: not for svgcoat2! From gsosa at snf.stanford.edu Fri Oct 12 13:14:14 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 12 Oct 2007 13:14:14 -0700 Subject: Shutdown svgcoat2 SNF 2007-10-12 10:56:47: Upstream not ready errors on Message-ID: Both tracks running OK. From gsosa at snf.stanford.edu Mon Oct 15 07:10:06 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 15 Oct 2007 07:10:06 -0700 Subject: Comment svgcoat2 SNF 2007-10-12 11:01:08: The shutdown was meant to be for svgcoat Message-ID: Both tracks are up and running From mrlin at snf.stanford.edu Wed Oct 17 17:46:03 2007 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Wed, 17 Oct 2007 17:46:03 -0700 Subject: Problem svgcoat2 SNF 2007-10-17 17:46:03: splashback Message-ID: did 23 wafers, all had very noticeable splash dots From vilanova at snf.stanford.edu Thu Oct 18 08:18:57 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 18 Oct 2007 08:18:57 -0700 Subject: Problem svgcoat2 SNF 2007-10-17 17:46:03: splashback Message-ID: someone replaced the bottle and did not purged line, I noticed a large amount of air in the line and dry resist on the tip of the dispense hose, purged line ,cleaned hose cycled wafers ( 6 each ) ok to use. P. S. it would be easier if the user reporting the problem specifies the program ( in this case was program 7) that way we dont have to go and check each one of them . From alexalex at snf.stanford.edu Sat Oct 20 15:37:11 2007 From: alexalex at snf.stanford.edu (alexalex at snf.stanford.edu) Date: Sat, 20 Oct 2007 15:37:11 -0700 Subject: Problem svgcoat2 SNF 2007-10-20 15:37:10: track 2 drain alarm is going off Message-ID: From vilanova at snf.stanford.edu Mon Oct 22 07:27:40 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 22 Oct 2007 07:27:40 -0700 Subject: Problem svgcoat2 SNF 2007-10-20 15:37:10: track 2 drain alarm is going off Message-ID: user could not pushed down button to empty the small carboy waste to the big one, on the tool ( coater 1 & 2 )TOP RIGHT HAND SIDE THERES TO BUTTON OYU PUSH THOSE DOWN WHEN THE ALARMS GOES OFF AFTER YOU EMPTY IT EVERYTHING WILL BE BACK TO NORMAL, THIS PROCEDURE IS IN THE TRAINING CLASS. !!! From jrjain at snf.stanford.edu Wed Oct 24 16:03:32 2007 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Wed, 24 Oct 2007 16:03:32 -0700 Subject: Problem svgcoat2 SNF 2007-10-24 16:03:32: Bake station vac error Message-ID: From vilanova at snf.stanford.edu Fri Oct 26 07:56:27 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 26 Oct 2007 07:56:27 -0700 Subject: Problem svgcoat2 SNF 2007-10-24 16:03:32: Bake station vac error Message-ID: cleaned up excess of resist from hotplate , cycled 10 wafers, ok to use. From calarrudo at snf.stanford.edu Wed Oct 31 15:22:11 2007 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Wed, 31 Oct 2007 15:22:11 -0700 Subject: Problem svgcoat2 SNF 2007-10-31 15:22:10: Track 2 Coat Message-ID: Sounds off balanced during spin cycle.