Problem svgcoat2 SNF 2007-10-05 15:58:58: EBR backsplash

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Oct 8 07:56:53 PDT 2007


The problem WAS NOT EBR SPLASH! , FOund air in the 
dispense line probably someone replaced the bottle and didnt
purged the line, sometimes running just a couple of wafers 
doesnt help because the amount of resist for each wafer is 
minimum , please purged line before Use, Cycled wafers, 
ready to use. 




More information about the svgcoat2-pcs mailing list