From jparker at snf.stanford.edu Tue Sep 4 11:52:00 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 4 Sep 2007 11:52:00 -0700 Subject: Comment svgcoat2 SNF 2007-09-04 11:51:59: Disp2 (Arm prgm4) long Message-ID: Arm program 4 dispense takes much longer than usual to get 220-3 resist on wafer. Dispense happens twice (once with line in 'home' position, once over wafer)? GS aware of issue. From jparker at snf.stanford.edu Tue Sep 4 12:11:22 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 4 Sep 2007 12:11:22 -0700 Subject: Problem svgcoat2 SNF 2007-09-04 12:11:21: 220-3 Resist Issues at center Message-ID: Light dime-sized swirl (not comet) in center of wafer on 2/4 test wafers. From gsosa at snf.stanford.edu Tue Sep 4 14:36:11 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 4 Sep 2007 14:36:11 -0700 Subject: Comment svgcoat2 SNF 2007-09-04 11:51:59: Disp2 (Arm prgm4) long Message-ID: Option select #10(nozzle cleanout needs to be set to 999 to turn off this function, 0r else you will get pre-dispense before each wafer. This is a carry over from last weeks memory loss. GS From vilanova at snf.stanford.edu Wed Sep 5 10:48:48 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Sep 2007 10:48:48 -0700 Subject: Problem svgcoat2 SNF 2007-09-04 12:11:21: 220-3 Resist Issues at center Message-ID: Cleaned catch cup and dispense hose, nozzle,cycled wafers, Ok to use. From pradeep13 at snf.stanford.edu Fri Sep 7 15:13:40 2007 From: pradeep13 at snf.stanford.edu (pradeep13 at snf.stanford.edu) Date: Fri, 7 Sep 2007 15:13:40 -0700 Subject: Problem svgcoat2 SNF 2007-09-07 15:13:40: error: chuck not centere Message-ID: alarm sounded several times. message was chuck not centered. From gsosa at snf.stanford.edu Fri Sep 7 16:44:58 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 7 Sep 2007 16:44:58 -0700 Subject: Problem svgcoat2 SNF 2007-09-07 15:13:40: error: chuck not centere Message-ID: Did not see any mis-positioning of wafers(front to back). Possibly the wafers had resist on the edges and were getting stuck on the belts. When the carriage would open the wafers would be pulled and cause misposition on the HPO. Cleaned the HPO carriage belts. There was a bake plate vacuum fault. Did hot plate pin calibration to improve timing. Also cleaned the hotplate thoroughly. Ran ~15 wafers with no vacuum break error. We will need to replace the digital vacuum sensor. The sensor is reading in mm/hg instead of inches/hg. Cannot get into setup because the small buttons are stuck. Track is OK otherwise. GS From linyoucao at snf.stanford.edu Thu Sep 20 00:35:49 2007 From: linyoucao at snf.stanford.edu (linyoucao at snf.stanford.edu) Date: Thu, 20 Sep 2007 00:35:49 -0700 Subject: Problem svgcoat2 SNF 2007-09-20 00:35:49: dispense 3 not work Message-ID: the line of dispense 3 obviously does not work now. From vilanova at snf.stanford.edu Thu Sep 20 07:16:13 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 20 Sep 2007 07:16:13 -0700 Subject: Problem svgcoat2 SNF 2007-09-20 00:35:49: dispense 3 not work Message-ID: checked and tested dispense # 3 , Purged Line, Cycled wafers Dispense system working Fine , no problem found, Operator Needs to be trained again??? From gth at snf.stanford.edu Tue Sep 25 12:43:18 2007 From: gth at snf.stanford.edu (gth at snf.stanford.edu) Date: Tue, 25 Sep 2007 12:43:18 -0700 Subject: Problem svgcoat2 SNF 2007-09-25 12:43:17: bad PR spin. Message-ID: 3 lab dummies + 2 personal dummies then the next prime wafer went fine all the other prime wafers are bad - streaking , and center blob....bad spin. please check this ASAP thanks -gaurav From vilanova at snf.stanford.edu Tue Sep 25 13:24:05 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Sep 2007 13:24:05 -0700 Subject: Problem svgcoat2 SNF 2007-09-25 12:43:17: bad PR spin. Message-ID: Someone replaced the resist bottle and didnt purged the line, sometimes running a couple of dummies doesnt help to get rid of the air gap in the line because the quantity of resist for every wafers es very small, purged line , cycled wafers, ok to use. From vilanova at snf.stanford.edu Thu Sep 27 10:45:46 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 27 Sep 2007 10:45:46 -0700 Subject: Comment svgcoat2 SNF 2007-09-27 10:45:45: centering tabs adjusted Message-ID: I just finished adjusting the centering tabs ( someone report it to me a few minutes ago ) I cycled wafers and Uniformity and EBR looks good, ready to use